WAVELENGTH VARIABLE INTERFERENCE FILTER, COLORIMETRIC SENSOR, COLORIMETRIC MODULE, AND METHOD OF MANUFACTURING THE WAVELENGTH VARIABLE INTERFERENCE FILTER

摘要

PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter having a large spectral wavelength region and high transmittance and resolution of dispersed light, a colorimetric sensor, and a colorimetric module.;SOLUTION: An etalon includes a pair of mirrors 56 and 57 facing each other and an electrostatic actuator for varying the gap between mirrors which is the interval between these mirrors. Each of the pair of mirrors 56 and 57 includes a plurality of dielectric films 551, and post members 552 that are disposed between these dielectric films 551, keeps the distance between the dielectric films 551 facing each other at a predetermined dimension, and forms an air layer 553 between the dielectric films 551 facing each other.;COPYRIGHT: (C)2011,JPO&INPIT