INSPECTION APPARATUS AND INSPECTION METHOD OF TAPE-LIKE MEMBER ATTACHED TO SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an inspection apparatus for quickly inspecting an eversion in a plurality of anisotropic conductive members attached to a substrate in a line.;SOLUTION: The inspection apparatus comprises an imaging camera 2 for imaging a plurality of the anisotropic conductive members 4a-4n attached to the substrate, a lead lightness/darkness measurement section 6 for measuring a brightness in a portion within an imaging range of the imaging camera in which the anisotropic conductive member of a lead 3 on the substrate is not attached, a binarization threshold value setting section 8 for setting a threshold value based on a measurement by the lead lightness/darkness measurement section, a threshold vale storing section 10 for storing the threshold value set by the binarization threshold value setting section, a binarized image generating section 9 for implementing a binarization process of the captured image of each portion of a plurality of the anisotropic conductive members sequentially imaged by the imaging camera based on the threshold value stored in the threshold value storing section, and a determination section 13 for determining a state at an end of a tape-like member based on the binarized image obtained by the binarized image generating section.;COPYRIGHT: (C)2011,JPO&INPIT