METHOD FOR CORRECTING PRIMARY ION ENERGY IN SECONDARY ION MASS ANALYSIS

摘要

PROBLEM TO BE SOLVED: To simply and accurately grasp effective primary energy in a method for correcting primary ion energy in secondary ion mass analysis to correct the shift from the set value on an apparatus.;SOLUTION: The primary ion energy dependence of profile shift quantity in the element distribution in a depth direction calculated by secondary ion mass analysis is preliminarily calculated as a standard chart using a standard sample and, when the element distribution in the depth direction is calculated using a measuring target sample, the primary ion energy dependence of the profile shift quantity in the element distribution in the depth direction calculated using the standard sample is calculated before actual measurement. The energy shift of the primary ion energy is calculated from the difference between the primary ion energy dependence of the profile shift quantity of the standard chart and the primary ion energy dependence of the profile shift quantity calculated before the actual measurement and the primary ion energy when calculating the element distribution in the depth direction using the measuring target sample is corrected on the basis of the calculated energy shift.;COPYRIGHT: (C)2011,JPO&INPIT