首页> 外国专利> WAVEFORM ANALYSIS DEVICE, WAVEFORM MEASURING DEVICE, WAVEFORM ANALYSIS PROGRAM, INTERFEROMETER DEVICE, PATTERN PROJECTION SHAPE MEASURING DEVICE, AND WAVEFORM ANALYSIS METHOD

WAVEFORM ANALYSIS DEVICE, WAVEFORM MEASURING DEVICE, WAVEFORM ANALYSIS PROGRAM, INTERFEROMETER DEVICE, PATTERN PROJECTION SHAPE MEASURING DEVICE, AND WAVEFORM ANALYSIS METHOD

机译:波形分析装置,波形测量装置,波形分析程序,干涉仪,图案投影形状测量装置和波形分析方法

摘要

PROBLEM TO BE SOLVED: To provide a waveform analysis device, along with a waveform measuring device, a waveform analysis program, and a waveform analysis method, capable of reliably suppressing an analysis error of fourier transform method.;SOLUTION: The waveform analysis method, used to extract phase information of an input waveform superposed with carriers by applying waveform analysis processing by fourier transform method to the input waveform, includes: an analysis procedure for narrowing the band of at least either of a plus primary spectrum and a minus primary spectrum from the fourier spectrum of the input waveform, separating the spectrums, and computing the phase information of the input waveform based of either of the separated spectrums; an estimating procedure for tentatively applying the same waveform analysis as that for the analysis means to the model of the input waveform so as to estimate analysis error occurring in the analysis procedure when the input waveform is subject to waveform analysis; and a correction procedure for correct the phase information computed by the analysis means by using the analysis error estimated in the estimating procedure.;COPYRIGHT: (C)2011,JPO&INPIT
机译:解决的问题:提供一种波形分析装置以及波形测量装置,波形分析程序和波形分析方法,能够可靠地抑制傅立叶变换法的分析误差。用于通过对输入波形进行傅里叶变换方法进行波形分析处理来提取叠加有载波的输入波形的相位信息的方法,包括:用于使正主频谱和负主频谱中的至少一个的频带变窄的分析步骤。输入波形的傅立叶频谱,分离频谱,并基于分离的频谱中的任何一个来计算输入波形的相位信息;估算程序,用于将与分析装置相同的波形分析暂时地应用于输入波形的模型,以估算在对输入波形进行波形分析时在分析程序中发生的分析误差; COPYRIGHT:(C)2011,JPO&INPIT;以及一种校正程序,用于使用估算程序中估算出的分析误差来校正分析装置所计算出的相位信息。

著录项

  • 公开/公告号JP2011059007A

    专利类型

  • 公开/公告日2011-03-24

    原文格式PDF

  • 申请/专利权人 NIKON CORP;

    申请/专利号JP20090210724

  • 发明设计人 NAKAYAMA SHIGERU;

    申请日2009-09-11

  • 分类号G01B11/24;G01B9/02;G01M11;G01B11/25;

  • 国家 JP

  • 入库时间 2022-08-21 18:23:10

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