ANALYZER FOR DISCHARGE PHENOMENON, PARTICLE BEHAVIOR ANALYZER, PARTICLE BEHAVIOR ANALYSIS SYSTEM, AND PROGRAM

摘要

PPROBLEM TO BE SOLVED: To analyze a discharge phenomenon of suspended particles which are not accumulated on a surface. PSOLUTION: An area boundary 610 is set in a particle motion area between charge surfaces 602 and 604 according to a predetermined rule. A discharge phenomenon a1 between the suspended particles (a) belonging to an area on the charge surface 602 side and those belonging to an area on the charge surface 604 side across the area boundary 610 is analyzed concerning the suspended particles (a) out of the suspended particles, and a discharge phenomenon b1 between the suspended particles (b) belonging to the area on the charge surface 604 side and those belonging to the area on the charge surface 602 side across the area boundary 610 is analyzed concerning the suspended particles (b) out of the suspended particles. Desirably, a discharge phenomenon a2 between the suspended particles (a) and those belonging to the charge surface 602 side is also analyzed concerning the suspended particles (a), and a discharge phenomenon b2 between the suspended particles (b) and those belonging to the area on the charge surface 604 side is also analyzed concerning the suspended particles (b). PCOPYRIGHT: (C)2011,JPO&INPIT