METHOD FOR ADJUSTING RESISTANCE VALUE OF STRAIN GAUGE, STRAIN GAUGE, AND PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method for adjusting resistance value of a strain gauge in which area of its strain sensing part can be minimized and resistance values can be adjusted without variation in detection sensitivity or resistance characteristic to strain, a strain gauge which adjusted resistance values in the resistance value adjusting method, and a diaphragm type pressure sensor using this strain gauge.;SOLUTION: In the strain gauge 20, strain sensing parts 20B, 20D are arranged on a central part 14X of a diaphragm 14, while remaining strain sensing parts 20A, 20C are arranged on a peripheral part 14Y of the diaphragm 14. Resistance values of these strain sensing parts 20A-20D are adjusted by arranging a conductive gel 22 so as to cover the whole surface of those strain sensing parts 20A-20D, after that, by impressing voltage with the strain sensing parts 20A-20D as anode to form anodic oxide film over the entire surface of the strain gauge 20, then adjusting thickness of the anodic oxide film.;COPYRIGHT: (C)2012,JPO&INPIT