METHOD OF DETECTING VIBRATION AMPLITUDE AND PHASE IN ROTATION DEVICE, AND DEVICE FOR DETECTING VIBRATION AMPLITUDE AND PHASE IN THE ROTATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of detecting vibration amplitude and phases in a cleansing for improving the detection accuracy of vibration amplitude and the phases of a rotor, while suppressing the cost, and to provide a device for detecting vibration amplitude and phase.;SOLUTION: In the method of detecting vibration amplitude and phases, a plurality of detection regions provided circumferentially on a surface that opposes a rotation detection section of the rotor are detected by one detection means, provided at the rotation detection section disposed opposite to a disk surface of the rotor nearly in a disk shape; the rotor is rotated, vibration per rotation of the rotor is detected in reference with a plurality of boundaries between the detection region and a non-detection region, namely, a region between the plurality of circumferential detection regions of the rotor; and vibration amplitude and phases are computed, based on vibration per rotation of the rotor as reference for the plurality of detected boundaries.;COPYRIGHT: (C)2011,JPO&INPIT