MEASURING APPARATUS, MEASURING COORDINATE SETTING METHOD, AND MEASURING COORDINATE NUMBER CALCULATION METHOD

摘要

PROBLEM TO BE SOLVED: To accurately measure the outcome of a device even over an entire surface of a substrate with little cost and time, the device including an integrated circuit, a magnetic head, a magnetic disc, a solar cell, an optical module, a light emitting diode, a liquid crystal display panel and the like that are formed on a substrate by repetitively performing film formation, resist application, exposure, development and etching.;SOLUTION: Multipoint measurement data and a number of points used for measurement are input, and measuring coordinates are calculated by a measuring coordinate calculation program 1161. Next, based on the calculated measuring coordinates, device characteristics such as dimensions are measured by a measuring program 1162. Next, approximate values of the device characteristics over the entire surface of the substrate are calculated by a curved surface approximation program 1163, and the calculated approximate values are output by an output program 1164.;COPYRIGHT: (C)2011,JPO&INPIT