首页> 外国专利> CHARACTERISTIC PREDICTION DEVICE, CHARACTERISTIC PREDICTION METHOD, CHARACTERISTIC PREDICTION PROGRAM, AND PROGRAM RECORDING MEDIUM

CHARACTERISTIC PREDICTION DEVICE, CHARACTERISTIC PREDICTION METHOD, CHARACTERISTIC PREDICTION PROGRAM, AND PROGRAM RECORDING MEDIUM

机译:特征预测装置,特征预测方法,特征预测程序和程序记录介质

摘要

PROBLEM TO BE SOLVED: To provide a characteristic prediction device capable of reducing storage capacity for storing operation data so as to predict characteristics of a manufactured article processed by a processing device.;SOLUTION: The characteristic prediction device 1 includes an operation data-gathering unit 2, a characteristic value-gathering unit 3, a feature extracting unit 4, a storage unit 5, a characteristic predicting unit 6, and a learning unit 7. The storage unit 5 stores a feature quantity extracted by the feature extracting unit 4. The characteristic predicting unit 6 predicts, by using a prediction model 8, a characteristic value showing characteristics of the manufactured article, from the feature quantity stored by the storage unit 5, and outputs the predicted characteristic value as a characteristic predicted value. The learning unit 7 learns and updates the prediction model 8 so as to decrease an error between the characteristic predicted value and characteristic value.;COPYRIGHT: (C)2011,JPO&INPIT
机译:解决的问题:提供一种特征预测装置,该特征预测装置能够减少用于存储操作数据的存储容量,以预测由处理装置处理的制成品的特征。解决方案:特征预测装置1包括操作数据收集单元参照图2,特征值收集单元3,特征提取单元4,存储单元5,特征预测单元6和学习单元7。存储单元5存储由特征提取单元4提取的特征量。特征预测单元6通过使用预测模型8,从存储单元5存储的特征量中预测表示制成品的特征的特征值,并输出预测特征值作为特征预测值。学习单元7学习并更新预测模型8,以减少特征预测值和特征值之间的误差。COPYRIGHT:(C)2011,JPO&INPIT

著录项

  • 公开/公告号JP2011071296A

    专利类型

  • 公开/公告日2011-04-07

    原文格式PDF

  • 申请/专利权人 SHARP CORP;

    申请/专利号JP20090220810

  • 发明设计人 YAMADA EIJI;

    申请日2009-09-25

  • 分类号H01L21/02;H01L21/66;

  • 国家 JP

  • 入库时间 2022-08-21 18:20:47

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