NONDESTRUCTIVE INTERNAL OBSERVATION APPARATUS AND NONDESTRUCTIVE INTERNAL OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a nondestructive internal observation apparatus for obtaining internal information on various depths in the interior of a specimen by one measurement.;SOLUTION: The nondestructive internal observation apparatus includes: a slit light irradiating means 10 for vertically and downwardly irradiating the specimen with a linear slit light including a light at a wavelength passing through the specimen; an image capturing means 20 for downwardly capturing images of an irradiated area X irradiated with the slit light and a surrounding area Y, and creating a two-dimensional image data; and a data processing means for extracting only image information on a part within the surrounding area Y at a distance d between the irradiated area X from the two-dimensional data, combining a plurality of the image information obtained from a plurality of the two-dimensional image data, and forming a two-dimensional image of the interior of the specimen. While the irradiated area X is moved by moving the slit light irradiating means 10 using a driving means, a plurality of the two-dimensional image data are created by capturing a plurality of images. The two-dimensional image of the interior of the specimen is formed by processing a plurality of the two-dimensional image data using the data processing means.;COPYRIGHT: (C)2011,JPO&INPIT