Temperature measuring device, temperature measuring method, temperature measuring system, control system, control method

摘要

PPROBLEM TO BE SOLVED: To suppress to the utmost a labor, a time and cost required for temperature measurement, by measuring at a plurality of measuring points at a time with a simple constitution. PSOLUTION: This device comprises a light source 110; the first splitter 120 for splitting light from the light source into light for temperature measurement and a reference light; the second splitter 130 for splitting the light for measurement into the first to the n-th measuring light to the number of n; a reference light reflection means 140 for reflecting the reference light; a driving means 142 for changing the optical path length of the reflected reference light by driving the reference light reflection means; and a light receiving means 150 for measuring interference between the first to the n-th measuring light reflected from a temperature measuring object T and the reference light reflected from the reference light reflection means. Each optical path length of the first to the n-th measuring light from the second splitter to the object T is mutually different respectively. PCOPYRIGHT: (C)2006,JPO&NCIPI