Burner for metal-doped silica glass particles synthesis and metal-doped silica glass particles synthesis method using the same

摘要

PROBLEM TO BE SOLVED: To provide a burner for synthesizing metal-doped silica glass with a uniform composition by a vapor phase synthesis method.;SOLUTION: This burner is for synthesizing microparticle aggregate by reacting a microparticle raw material gas, a combustion gas and a combustion supporting gas. The burner comprises a squirt hole of the microparticle raw material gas and the combustion gas, a squirt hole of an inert gas, and a squirt hole of the combustion supporting gas in this order from the center of the burner toward the outside in a concentric manner, where in each shape of the holes is elliptical with ≥20 ratio of major axis/minor axis, and the height of front end of the squirt hole squirt hole of the combustion gas is lower than that of at least either of the squirt hole of the inert gas or the squirt hole of the combustion-supporting gas.;COPYRIGHT: (C)2008,JPO&INPIT