Clean booth and work system using the clean booth

摘要

PROBLEM TO BE SOLVED: To provide a clean booth for performing a plurality of production processes by placing a partially fabricated item in an atmosphere of high air cleanliness, even without automatically controlling the movement of the partially fabricated item between production devices.;SOLUTION: This clean booth 1 is composed of a booth body having a top surface and a peripheral wall and a fan filter unit 5 arranged on the top surface; and forms an installation part airtightly installed on the carrying-in outlet side of the production device 3 and an opening part 1d for communicating with a carrying-in outlet 3a by its installation part, on one surface of the peripheral wall; and forms an entrance 1c for allowing a person to go in and out on the other surface of the peripheral wall.;COPYRIGHT: (C)2006,JPO&NCIPI