Electric quality decisive method of test sample

摘要

The method of acquiring the electric quality of the test sample which has with the non-conductive area and the test area of conductivity or semi- conductivity by doing multiple measurement the multi point probes (multi-point) of making use. The step which selects one tip/chip which becomes the electric current source which is used in order the said method, carrying step and the probe which supply the magnetic field which possesses the line of magnetic force which passes the test area vertically to the 1st position of the test area, is positioned between step and decide the distance between the tips/chips step and the tip/chip which decide the position of each tip/chip for the boundary which is between step and the non-conductive area and the test area which make the electric conduction tip/chip of the probe contact with the test area to decide the voltage with the test sample and, step and the probe which measure 1It includes with the step which calculates the electric quality of the test area the step which is made to move and, the step which measures 2 and, 1st measurement and on the basis of 2nd measurement.