From defective data processing manner, and the central processing unit null

摘要

PROBLEM TO BE SOLVED: To easily determine a defect inspection condition that raises the average detection ratio or DOI detection ratio and can suppress the noise detection ratio.;SOLUTION: Defect/image information output from an inspection device is butted on ADR/ADC information output from an observation means on a data processor, they are listed and displayed, and a relation between the defect characteristic amount and average detection ratio is displayed using the data, and the defect characteristic amount and the number of detections are displayed every review category.;COPYRIGHT: (C)2007,JPO&INPIT