Continuing with the macro image display system, and the macro

摘要

PPROBLEM TO BE SOLVED: To provide a macroimage display system for displaying flaw information at the time of visual examination so as to reduce variations in the judgment of an operator. PSOLUTION: The substrate manufactured by the manufacturing apparatus of a production line is automatically inspected by an automatic macro-inspection device 103 and the substrate information data related to the flaw of the substrate and image data are formed. A plurality of these data are loaded in a visual macro-examination device 100 for each substrate and the overlap of the flaw is calculated by a data processing part 408 on the basis of the flaw position for each substrate. This calculation result is displayed on a screen and outputted to another computer if necessary. PCOPYRIGHT: (C)2007,JPO&INPIT