首页> 外国专利> Crystal devices using a quartz resonator element and its manufacturing method and a quartz crystal resonator element as well as an electronic device using the mobile telephone and a quartz crystal device utilizing crystal devices,

Crystal devices using a quartz resonator element and its manufacturing method and a quartz crystal resonator element as well as an electronic device using the mobile telephone and a quartz crystal device utilizing crystal devices,

机译:使用石英谐振器元件的晶体器件及其制造方法以及使用移动电话的石英晶体谐振器元件以及使用该晶体振子的石英晶体器件,

摘要

PPROBLEM TO BE SOLVED: To provide a crystal oscillator piece that is easily manufactured by simultaneously performing its external formation etching and groove etching and reducing manufacturing processes in manufacturing the crystal oscillator piece, method of manufacturing the same, a crystal device using the crystal oscillator piece, and a mobile telephone and electronic apparatus using the crystal device. PSOLUTION: The crystal oscillator piece is entirely formed of crystal and provided with a base 51 and a pair of oscillation arms 34 and 35 extending in parallel from the base, wherein the respective oscillation arms have groove parts 56 and 57 extending in a length direction. At the groove parts of the respective oscillation arms, a plurality of small grooves 61 and 62 partitioned in a width direction are parallely and continuously formed along the length direction of the respective oscillation arms. PCOPYRIGHT: (C)2009,JPO&INPIT
机译:

要解决的问题:提供一种晶体振荡器片,其制造方法,使用该晶体振荡器的晶体器件,该晶体振荡器片通过同时执行其外部形成蚀刻和凹槽蚀刻并减少制造该晶体振荡器片的制造过程而容易地制造。晶体振荡器片,以及使用该晶体器件的移动电话和电子设备。

解决方案:晶体振荡器片完全由晶体形成,并具有基座51和从该基座平行延伸的一对振动臂34和35,其中各个振动臂具有在其中延伸的凹槽部分56和57。长度方向。在各振动臂的槽部上,沿宽度方向划分的多个小槽61、62沿各振动臂的长度方向平行且连续地形成。

版权:(C)2009,日本特许厅&INPIT

著录项

  • 公开/公告号JP4636170B2

    专利类型

  • 公开/公告日2011-02-23

    原文格式PDF

  • 申请/专利权人 セイコーエプソン株式会社;

    申请/专利号JP20080315339

  • 发明设计人 棚谷 英雄;山田 祥之;

    申请日2008-12-11

  • 分类号H03H3/02;H03H9/19;H03H9/215;H01L41/09;H01L41/18;H01L41/22;

  • 国家 JP

  • 入库时间 2022-08-21 18:19:04

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