Delivering and receiving manner of the goods in the suspended pattern ascent and descent conveying winch and delivering and receiving

摘要

PROBLEM TO BE SOLVED: To make exchangeable an FOUP, which is mounted on an FOUP carrying-in/carrying-out port of a processing station of a plurality of processing stations provided along the annular track of each suspended ascending/descending carriage truck and applying different processings to a semiconductor substrate, and stores in it the substrate processed-off in the processing station, and an FOUP which stores in it a substrate intended to be processed in the processing station, on the basis of the ascending/descending function of each suspended type ascending/descending carriage truck.;SOLUTION: An FOUP 9a and an FOUP 9b are made exchangeable by the ascending/descending mechanism of each suspended ascending/descending carriage truck, and by the action of a slide plate 10by of a suspended type temporary storage shelf, which advances/retreats in the horizontal direction and in the ascending/descending region of each carriage truck, and can mount the two FOUPs along its advancing/retreating direction. The FOUP 9a is mounted on a FOUP carrying-in/carrying-out port 5a of each processing station 5, and stores in it the substrate processed-off in each processing station 5. The FOUP 9b is positioned above the FOUP 9a, and stores in it the substrate intended to be processed in each processing station 5.;COPYRIGHT: (C)2007,JPO&INPIT