The liquid inflow from the multiple entrances and each entrance the liquid inflow into the capacity control mannered null

摘要

PROBLEM TO BE SOLVED: To mix liquid of different viscosities while maintaining effects such as reduction of reagent in a minute flow passage.;SOLUTION: In a flow rate control device, desired target flow rate value 58 is established in a data establishment part 59 of a flow rate control device 50 for each liquid A and liquid B. Consequently, the flow rate control device 50 determines apply voltage values 68A, 68B for vibrating piezoelectric element 11a, 11b to make flow rate of liquid A, B transferred via minute flow passage from each micro pump a set target flow rate 58 in the flow rate control device 50. Voltage EA, EB of the apply voltage values 68A, 68B are applied to the piezoelectric element 11a, 11b.;COPYRIGHT: (C)2006,JPO&NCIPI