首页> 外国专利> Especially, the substrate in mannered null optics, electronics or the photoelectron engineering which produce

Especially, the substrate in mannered null optics, electronics or the photoelectron engineering which produce

机译:尤其是,采用光学,电子或光电子工程学的方式生产的基材

摘要

The invention relates to a method for fabricating substrates (30), in particular for optics, electronics, or optoelectronics, by transferring a layer (170) of a material suitable for said type of application, and in particular a semiconductor material, onto a support (20). Said method is characterized in that it comprises the following steps : a) forming a flat face (13) termed the "front face" on a raw ingot (10) of material intended to form said layer (170); b) implanting atomic species beneath said front face (13) to a controlled mean implantation depth to create a zone of weakness (16) defining a top layer (17) of said ingot (10 ); c) bonding a support (20) onto said front face (13); d) directly detaching from the ingot (10), at the zone of weakness (16), the portion (170) of said top layer (17) which is bonded to said support (20); and e) re-commencing said cycle of operations from step b) at least once. Said method saves starting material.
机译:本发明涉及一种通过将适合于所述应用类型的材料,特别是半导体材料的层(170)转移到载体上来制造特别是用于光学,电子或光电子学的衬底(30)的方法。 (20)。所述方法的特征在于其包括以下步骤:a)在旨在形成所述层(170)的材料的原始锭料(10)上形成被称为“正面”的平面(13); b)将原子种类注入到所述前表面(13)下方至受控的平均注入深度,以形成限定所述晶锭(10)的顶层(17)的弱化区(16); c)将支撑件(20)粘合到所述前表面(13)上; d)在薄弱区(16)处直接从铸锭(10)上取下所述顶层(17)的与所述支撑件(20)结合的部分(170); e)至少从步骤b)开始重新开始所述操作周期。所述方法节省了起始材料。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号