The first cleaning process where it soaks the washed object

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method for efficiently removing moisture on the surface of an object to be cleaned and a cleaning apparatus.;SOLUTION: The cleaning method comprises the steps of: immersing the object to be cleaned in a cleaning component-dissolved cleaning agent to clean the object to be cleaned; immersing the resulting object to be cleaned in a hydrophobic liquid mainly composed of a hydrocarbon so that the moisture on the surface of the object to be cleaned is replaced with the hydrophobic liquid to remove the moisture on the surface of the object to be cleaned; cleaning the moisture-removed object to be cleaned by the liquid hydrocarbon; and drying the resulting object to be cleaned. This cleaning apparatus is provided with a first cleaning part for immersing the object to be cleaned in the alkaline cleaning agent to clean the object to be cleaned, a moisture replacing part for immersing the resulting object to be cleaned in the hydrophobic liquid based on the hydrocarbon, a second cleaning part for cleaning the moisture-removed object to be cleaned by the hydrocarbon and a drying part for drying the surface of the resulting object to be cleaned.;COPYRIGHT: (C)2006,JPO&NCIPI