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Preparation method of specimen for electron microscope, sample observation method using the same, and sample observation apparatus

机译:电子显微镜用试样的制备方法,使用该试样的试样观察方法以及试样观察装置

摘要

An object of the present invention is to provide a medium; a specimen; a method for preparing the specimen; a method for observing the specimen; a sample cell; and an electron microscope capable of easily solving the problem of charge-up and further capable of observing a real shape or the like of a sample with a SEM, a TEM or the like. For the purpose of achieving the above-described object, the present invention uses an electrical conductivity-imparting liquid medium, for use in a microscope, which includes an ionic liquid as an essential component thereof and is impregnated into the entirety of a SEM or TEM sample or applied to the observation surface of a SEM or TEM sample to impart electrical conductivity at least to the observation surface of the sample. According to the present invention, the charge built up on the sample surface can be released simply by impregnating or coating the sample with the ionic liquid, and hence the problem of charge-up can be easily solved. Further, even when a sample impregnated or coated with the ionic liquid is placed under vacuum, the ionic liquid is not evaporated from the sample, and hence a biological sample can be observed as it is in an original shape.
机译:本发明的目的是提供一种介质。标本一种制备样品的方法;一种观察标本的方法;样品池电子显微镜可以容易地解决带电的问题,并且还可以利用SEM,TEM等观察样品的真实形状等。为了实现上述目的,本发明使用在显微镜中使用的赋予导电性的液体介质,该液体介质包括离子液体作为其基本成分并且被浸渍到整个SEM或TEM中。样品或施加到SEM或TEM样品的观察表面上,以至少向样品的​​观察表面赋予导电性。根据本发明,可以简单地通过用离子液体浸渍或涂覆样品来释放累积在样品表面上的电荷,因此可以容易地解决带电问题。此外,即使将浸渍或涂覆有离子液体的样品置于真空下,离子液体也不会从样品中蒸发,因此可以观察到生物样品的原始形状。

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