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The hole formation process which forms the hole of the depth which does not penetrate completely the aforementioned insulating
The hole formation process which forms the hole of the depth which does not penetrate completely the aforementioned insulating
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机译:形成深度不能完全穿透上述绝缘的孔的成孔工艺
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摘要
PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor film for improving the characteristics of elements such as a thin film transistor at the time of forming a semiconductor film by carrying out melting and crystallization using micropores.;SOLUTION: This method for manufacturing a semiconductor film comprises a micropore formation process for forming a micropore (14) in an insulating film (12) formed on a substrate (10); a first film formation process for forming a non-single crystal semiconductor film (16) in the micropore and on the insulating film; a melting and crystallizing process for melting and crystallizing the non-single crystal semiconductor film, and for forming a first crystal semiconductor film (18) with the micropore as almost a center; and a second film formation process for forming a second crystal semiconductor film (20) by epitaxially growing the semiconductor on the first crystal semiconductor film.;COPYRIGHT: (C)2005,JPO&NCIPI
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