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Electromagnetic wave-particle beam spectroscopic methods and electromagnetic wave-particle beam spectrometer

机译:电磁波粒子束光谱法和电磁波粒子束光谱仪

摘要

are resistant electrical noise electromagnetic noise, vibration, loud noise, particle beam on a particular focus and heat, particle beam of electromagnetic waves other than, caused by electromagnetic waves, to the recoil of the solid constituent atoms and mechanical disruption, detection to provide an electromagnetic wave-particle beam spectrometer and electromagnetic wave-particle beam spectroscopic methods spectral function with a strong resistance as compared to the energy decomposition prior art with respect to radiation exposure means is hardly deteriorated. The Laplace transform filter 11 to Laplace transform the intensity of the incident spectrum, and the detecting element 15 for detecting the transmitted intensity of the incident spectrum by inverse Laplace transform the transmitted intensity of the incident spectrum is detected, spectrometer 10 Laplace transform filter I comprises an arithmetic unit 17 for calculating the incident intensity of the incident spectrum incident on the 11.
机译:具有抗电磁噪声,振动,大声噪声,特定焦点和热上的粒子束,电磁波引起的电磁波以外的电磁波对固体成分原子的反冲和机械破坏的抵抗力,可提供电磁波粒子束光谱仪和电磁波粒子束光谱法与辐射曝光装置的能量分解相比,与现有技术的能量分解相比,具有较强的电阻谱功能。拉普拉斯变换滤波器11至拉普拉斯变换入射光谱的强度,并且通过逆拉普拉斯变换来检测入射光谱的透射强度的检测元件15被检测,入射光谱仪10的拉普拉斯变换滤波器I包括运算单元17,用于计算入射在11上的入射光谱的入射强度。

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