The clean room and its design application manner

摘要

PROBLEM TO BE SOLVED: To provide a clean room capable of accurately controlling temperatures in a working area by sufficiently mixing a recirculating air with a conditioned air and feeding the mixed air to the working area.;SOLUTION: This clean room 1 comprises the working area 11 and a maintenance area 12. These both areas 11 and 12 are divided by partitions 4 starting at the floor 5 of a shared grating structure to a shared ceiling 3. A fan filter unit 6 for air supply is installed at the ceiling part of the working area 11. A supplied air lowered in the working area 11 flows into the maintenance area 12 through a floor 5, and flows from the suction port 31 of the ceiling 3 to a ceiling chamber 13 in the form of a recirculating air rising in the maintenance area 12. The air conditioned by an air conditioner 2 is mixed with the recirculation air in the ceiling chamber 13 and the mixed air is fed to the working area 11 through the fan filter unit 6. A delivery port 22 for the conditioned air is formed just above a suction port 31.;COPYRIGHT: (C)2007,JPO&INPIT