PROBLEM TO BE SOLVED: To provide a device capable of determining contamination simply and quickly, and devising a countermeasure at developmental time of contamination adequately and promptly.;SOLUTION: The inspection apparatus 1 of contamination is equipped with a surface observing means 2 for observing an enlarged image of the site containing contamination, an ultraviolet-ray irradiating means 3 for irradiating ultraviolet rays to the site containing contamination, and a visible-light irradiating means 4 for irradiating visible light to the site containing contamination, while the surface observating means 2, the ultraviolet-ray irradiating means 3 and the visible-light irradiating means 4 are jointed by a jointing member 11 to each other, to obtain an integral structure which is, moreover, equipped with a transparent mount 12 as a holding means for holding the distances between each edge of the means 2, 3, and 4 and an inspected object at a predetermined distance.;COPYRIGHT: (C)2009,JPO&INPIT
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