Applies the scanning-type non-linear dielectricity factor microscope lays out the electrode on the super high

摘要

PROBLEM TO BE SOLVED: To provide a nonlinear dielectric microscope developed for usage of ultrahigh-sensitivity range sensing of vertical direction by using of the phenomenon based on an evidence where, when a gap is prepared between a probe and a sample surface, large variation of nonlinear dielectric signal by changing a minute gap can be predicted from theoretical analysis.;SOLUTION: In the ultrahigh-sensitivity displacement measuring method with a scanning nonlinear dielectric microscope which deploys a conductive probe facing a dielectric surface arranging electrodes on the back surface via a minute gap and, while applying alternating electric field of low frequency perpendicular to the surface against the dielectric substance, detects a capacity change of the capacity just below the probe, the probe with small apex radius is composed so as to combine with the dielectric substance, based on the fact that signal intensity can be expressed with ΔC/V^n-2=ε(n)S_nl(ε(2),H)/a^n-3, when a gap H=(h/a) occurs which is standardized by the probe apex radius a between the probe and the dielectric substance.;COPYRIGHT: (C)2011,JPO&INPIT