UV nanoimprint method, and a method of manufacturing the resin replica mold, and a method of manufacturing the magnetic recording medium, and magnetic recording and reproducing apparatus

摘要

The present invention, an ultraviolet light after the work of forming a thin film made of a UV curable resin on a substrate, and compression molding is pressed against a mold having a pattern formed on the surface, simultaneously with the compression molding or with the compression molding A UV nanoimprint method of transferring the pattern on the thin film by irradiation, irradiated with ultraviolet light irradiation apparatus equipped with temperature rise suppression means, a light source of the ultraviolet light irradiation device, the ultraviolet light, ultraviolet light same time providing a UV nanoimprint method which is characterized by using a light source that heat rays are not emitted continuously.