Specific substance observation device and specific substance observation method

摘要

PROBLEM TO BE SOLVED: To allow a specific granular substance to be observed easily, while the substance is being temporarily fixed, and to allow the substance to be observed continuously by readily repeating the fixation and observation many times.;SOLUTION: A specific substance observation device for observing the specific granular substance S on a substrate 2 comprises: a probe 3 having a plane lever section 20, an opening 21 formed at the tip of the lever section, a holder section 22 for supporting the lever section, and a deflection measurement means for measuring the deflection of the lever section; a cantilever section 5 having a probe 4; a moving means for moving the cantilever and the probe 3 in three-dimensional directions; and a control means for pressing the specific substance against the substrate and temporarily fixing it, while the specific substance is being fitted into the opening, and controlling the moving means so that the surface of the temporarily fixed specific substance is scanned by the probe.;COPYRIGHT: (C)2007,JPO&INPIT