The micro metric configuration component null substrate which executes manner and its manner which inspect the airtightness of the airtightness cavity of the micro metric configuration component

摘要

At least 1 micro metric constitution components (1) the airtightness cavity (14) in order to inspect airtightness, the above-mentioned constitution component has, the structural element where the baseplate (2) is formed on one part or in that (5, 6 and 10) with, the cap which is locked to 1 places of the baseplate in order to protect the structural element (3) and, optical or the indicatory element where electric quality changes under existing of the reactivity fluid (4 and 15). Indicatory element, in case of optical inspection copper layer (4), the parajiumu resistor (15) is in case of electric inspection. The micro metric constitution component (1) is arranged inside the container, that container is stopped next airtightly. The reactivity fluid fills up by this container, under pressure, it is hydrogen when that fluid is oxygen when it is optical inspection, in addition is electric inspection. The constitution component inside the container specified period, receives the reactivity fluid pressure which is higher than as much as 10 bars/var, at the same time thermal activation (T100C) or optical activation (500 nano- meter) receives. After this period elapsing, indicatory element (4 and 15) optics or by electric inspection, the above-mentioned cavity (14) airtightness is required. Selective figure Figure 1