In the emission uniformity coefficient measurement equipment of the crosswise emission

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for measuring uniformity in the discharge of photoresist discharged from the slit nozzle of a substrate-coating apparatus.;SOLUTION: The measuring apparatus of uniformity in the discharge of the slit nozzle comprises: a discharge liquid distributor for distributing a discharge liquid discharged from the slit nozzle to the widthwise direction of the slit nozzle for each fixed section; and a discharge liquid measurement unit for measuring the amount of discharge liquid distributed from the discharge liquid distributor. The measurement method of uniformity in the discharge of the slit nozzle includes: a step of distributing the discharge liquid discharged from the slit nozzle for each fixed section to the widthwise direction of the slit nozzle, a step of collecting the distributed discharge liquid individually, and a step of measuring the amount of discharge of the collected discharge liquid.;COPYRIGHT: (C)2008,JPO&INPIT