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METHOD OF CHECKING AN INSPECTION APPARATUS AND METHOD OF ESTABLISHING A MEASUREMENT VARIABLE OF THE INSPECTION APPARATUS
METHOD OF CHECKING AN INSPECTION APPARATUS AND METHOD OF ESTABLISHING A MEASUREMENT VARIABLE OF THE INSPECTION APPARATUS
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机译:检查检查设备的方法和建立检查设备的测量变量的方法
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摘要
In order to establish a lighting intensity of an inspection apparatus, an inspection board is installed in an inspection apparatus. Then, a width of a histogram of a captured image acquired through a camera of the inspection apparatus is adjusted to avoid from a dark region and a bright region. Thereafter, a lighting intensity of the inspection apparatus is adjusted by adjusting the histogram to be near a middle of a graph. Thus, a setting time of an inspection condition stored in a job file may be reduced to increase the user's convenience, and measurement error due to mis-establishment may be reduced to enhance inspection precision.
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