HEATER PLATE WITH EMBEDDED HYPER-CONDUCTIVE THERMAL DIFFUSION LAYER FOR INCREASED TEMPERATURE RATING AND UNIFORMITY

摘要

A heater plate is constructed with an embedded thermal diffusion layer of pyrolytic graphite to provide increased temperature uniformity in a critical heating surface. The heater has first and second metal plates with a heater element contained within the first plate and a core of the pyrolytic graphite diffusion layer sandwiched between the heater element and the second metal plate. The diffusion layer may be sputter metal coated to improve bonding of the layer to the plates.