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FIZEAU INTERFEROMETER AND MEASUREMENT METHOD USING FIZEAU INTERFEROMETER
FIZEAU INTERFEROMETER AND MEASUREMENT METHOD USING FIZEAU INTERFEROMETER
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机译:FIZEAU干涉仪及使用FIZEAU干涉仪的测量方法
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摘要
A Fizeau interferometer includes: a reference spherical surface; and a measuring apparatus including an intensity obtaining section and a form calculating section, wherein: a focal point of the reference spherical surface is aligned with a center of curvature of the spherical surface in order to set the center of curvature as a center position, and two positions equidistant from the center position are set as a start position and an end position, the intensity obtaining section obtains the intensity maps of the interferograms at n positions at equal intervals; and the form calculating section measures the form of the spherical surface using a phase analysis method in which a coefficient of the intensity maps of the interferograms at an i-th position and a coefficient of the intensity maps of the interferograms at an (n−i+1)th position have a same value.
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