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Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
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机译:亲水性涂料,亲水性涂料的沉积方法以及改进的薄膜沉积技术
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摘要
The invention provides certain embodiments that involve sputtering techniques for applying a mixed oxide film comprising silica and titania. In these embodiments, the techniques involve sputtering at least two targets in a common chamber (e.g., in a shared gaseous atmosphere). A first of these targets includes silicon, while a second of the targets includes titanium. Further, the invention provides embodiments involving a substrate bearing a hydrophilic coating, which can be deposited by sputtering or any other suitable thin film deposition technique. The invention also provides techniques and apparatuses useful for depositing a wide variety of coating types. For example, the invention provides thin film deposition technologies in which sputtering apparatuses or other thin film deposition apparatuses are employed.
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