SURFACE ACOUSTIC WAVE DEVICE AND SURFACE ACOUSTIC WAVE BIOSENSOR
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机译:表面声波装置和表面声波生物传感器
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摘要
A surface acoustic wave device, including: a piezoelectric substrate; an interdigitated transducer electrode disposed on the substrate; an oxide film disposed on surface of the interdigitated transducer electrode; and a hydrophobic film disposed on a surface of the oxide film.
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