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Method and system for producing tomographic image by optical tomography with processing of interference light signals

机译:通过光学层析成像处理干涉光信号产生层析成像图像的方法和系统

摘要

When reflection light, reflected from a measurement target that has been irradiated with measurement light in such a manner to scan the measurement target, and reference light are combined in each wavelength sweep, interference light is detected as interference signals. When a thinning region in which the interference signals obtained by detecting the interference light in each wavelength sweep are thinned so that the interference signals that are used to produce the tomographic image remain is set, thinning is performed on the plurality of interference signals in the thinning region. Light intensity information about the measurement target in the thinning region is obtained, based on the interference signals for the respective wavelength sweeps, the interference signals remaining after thinning. The tomographic image in the thinning region is produced based on the obtained light intensity information.
机译:当从被测量光照射的测量对象反射的反射光以扫描测量对象的方式与参考光在每次波长扫描中组合时,检测到干涉光作为干涉信号。当设置其中通过检测每个波长扫描中的干涉光而获得的干涉信号变稀而保留用于生成断层图像的干涉信号的稀化区域时,在稀化中对多个干涉信号进行稀化地区。基于各个波长扫描的干涉信号,获得了在稀疏区域中关于测量目标的光强度信息,该干涉信号在稀疏之后仍然存在。基于所获得的光强度信息来产生稀疏区域中的断层图像。

著录项

  • 公开/公告号US7944568B2

    专利类型

  • 公开/公告日2011-05-17

    原文格式PDF

  • 申请/专利权人 YUICHI TERAMURA;SATOSHI OZAWA;

    申请/专利号US20080342618

  • 发明设计人 YUICHI TERAMURA;SATOSHI OZAWA;

    申请日2008-12-23

  • 分类号G01B9/02;

  • 国家 US

  • 入库时间 2022-08-21 18:11:23

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