首页>
外国专利>
Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate
Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate
展开▼
机译:用于对基板上的温度进行空间和时间控制的制造设备的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
An apparatus for control of a temperature of a substrate has a temperature-controlled base, a heater, a metal plate, a layer of dielectric material. The heater is thermally coupled to an underside of the metal plate while being electrically insulated from the metal plate. A first layer of adhesive material bonds the metal plate and the heater to the top surface of the temperature controlled base. This adhesive layer is mechanically flexible, and possesses physical properties designed to balance the thermal energy of the heaters and an external process to provide a desired temperature pattern on the surface of the apparatus. A second layer of adhesive material bonds the layer of dielectric material to a top surface of the metal plate. This second adhesive layer possesses physical properties designed to transfer the desired temperature pattern to the surface of the apparatus. The layer of dielectric material forms an electrostatic clamping mechanism and supports the substrate.
展开▼