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Method of designing a probe card apparatus with desired compliance characteristics
Method of designing a probe card apparatus with desired compliance characteristics
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机译:设计具有期望柔顺特性的探针卡设备的方法
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摘要
A probe card apparatus is configured to have a desired overall amount of compliance. The compliance of the probes of the probe card apparatus is determined, and an additional, predetermined amount of compliance is designed into the probe card apparatus so that the sum of the additional compliance and the compliance of the probes total the overall desired compliance of the probe card apparatus.
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