Eddy current damper, and lithographic apparatus having an eddy current damper

摘要

An eddy current damper has an electrically conducting body having a face, and an array of magnets extending over the face of the conducting body. Each magnet generates a magnetic field directed essentially transversely to the face of the conducting body. The magnet array generates oppositely directed magnetic fields each having a field width. At least one of the magnetic fields generated by the magnets has a field width that is smaller than a field width of an adjacent magnetic field. The conducting body may have an opening having a width that is smaller than a field width of a corresponding magnetic field.