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Inertial force sensor including a sense element, a drive circuit, a sigma-delta modulator and a signal processing circuit
Inertial force sensor including a sense element, a drive circuit, a sigma-delta modulator and a signal processing circuit
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机译:惯性力传感器,包括传感元件,驱动电路,sigma-delta调制器和信号处理电路
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摘要
The present invention particularly relates to an inertial force sensor used in various electronic equipment, for example, used for altitude control, navigation, or the like, of a mobile body such as an aircraft, an automobile, a robot, a watercraft and a vehicle in which the detection accuracy is enhanced. Therefore, a sense circuit constituting the inertial force sensor includes a sigma-delta modulator converting a sense signal output from a sense electrode into a one-bit digital signal, and a signal processing circuit (i) comparing a monitor signal output from a monitor electrode with predetermined reference amplitude information, (ii) carrying out operation processing of the one-bit digital signal based on this comparison information, and (iii) adjusting an output level of the output signal.
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