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Method for determining an influencing variable acting on the eccentricity in a goniometer

机译:确定作用于测角仪中偏心率的影响变量的方法

摘要

The invention relates to a method for determining at least one influencing variable acting on the eccentricity in a goniometer, using a detector arrangement consisting of four optical detector elements, and a rotational body comprising a plurality of pattern elements arranged around a pattern center, the rotational body being rotatably arranged about an axis. According to said method, at least some of the pattern elements are reproduced on the detector arrangement, the positions of the pattern elements reproduced on the detector arrangement are resolved, and the eccentricity of the pattern center in relation to a detector center of the detector arrangement is determined. A plurality of such eccentricity measurements for different rotational positions enables different influencing variables acting on the current eccentricity to be separated, especially by forming units.
机译:本发明涉及一种方法,该方法使用由四个光学检测器元件组成的检测器装置以及包括围绕图案中心布置的多个图案元件的旋转体来确定作用在测角仪上的偏心率的至少一个影响变量。主体绕轴线可旋转地布置。根据所述方法,在检测器装置上再现至少一些图案元素,在检测器装置上再现的图案元素的位置被解析,并且图案中心相对于检测器装置的检测器中心的偏心率决心,决意,决定。对于不同的旋转位置的多个这样的偏心率测量使得尤其是通过形成单元能够分离作用在当前偏心率上的不同影响变量。

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