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Photo-detector for detecting image signal of infrared laser radar and method of manufacturing the same
Photo-detector for detecting image signal of infrared laser radar and method of manufacturing the same
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机译:用于检测红外激光雷达的图像信号的光电检测器及其制造方法
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摘要
A photo-detector, in which metal wiring for connecting electrodes is arranged on a planarized surface and thus the metal wiring arrangement is simplified, and a method of manufacturing the same are provided. The photo-detector includes a multi-layer compound semiconductor layer formed on a compound semiconductor substrate. A number of p-n junction diodes are arranged in a regular order in a selected region of the compound semiconductor layer, and an isolation region for individually isolating the p-n junction diodes is formed by implanting impurity ions in the multi-layer compound semiconductor layer. The isolation region and the surface of the compound semiconductor layer are positioned on the same level. The isolation region may be a Fe-impurity region.
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