Failure analysis system, failure analysis method, and program product for failure analysis

摘要

A failure analysis system includes an obtaining portion that obtains read-in image information that is image information obtained by reading an output image, a memory that stores fundamental image reduction information that is information in which an information amount of fundamental image information is reduced, the fundamental image information serving as a fundamental of the output image, a calculating portion that calculates a characteristic value of a projecting waveform by use of differential information between read-in image reduction information and the fundamental image reduction information, the read-in image reduction information being information in which the information amount of the read-in image information obtained by the obtaining portion is reduced, the fundamental image reduction information being stored in the memory; and a determining portion that determines a defect type group that is a group of defect types of elements included in the output image by use of a clustering process.