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Surface shape metric and method to quantify the surface shape of electronic packages
Surface shape metric and method to quantify the surface shape of electronic packages
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机译:表面形状度量和量化电子封装表面形状的方法
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摘要
A method of quantifying a shape of a surface includes measuring an elevation (z) of the surface at a plurality of locations in an x-y plane of the surface. The measurement data is fit to a series expansion in terms of one or more base functions that include a series expansion fit. A vector of shape coefficients are calculated from the series expansion fit. A vector of shape coefficients are output.
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