Method for controlling pulse modulated RF power and deice supplying pulse-modulated RF power

摘要

In a pulse power control, power amplitude (peak power) of output power is controlled to be constant against the fluctuation of the power, whereby it is possible to avoid an effect on a load, which is caused by the fluctuation of the power amplitude of the output power. The pulse modulated RF power control method includes an output amplitude control step for controlling amplitude of a pulse output, and a duty control step for controlling a duty ratio of the pulse output. The output amplitude control step performs a constant amplitude control to control an amplitude value of the pulse output so that the amplitude value becomes equal to a set amplitude value. The constant amplitude control according to the output amplitude control, for instance, gives a feedback of the amplitude value of the pulse output outputted by the power control, obtains a difference value between the feedback value and the set amplitude value, and controls the amplitude value of the pulse output so that the difference value becomes zero.