USE OF A PRESSURIZED CERAMIC HEAT EXCHANGER AS AN INTEGRAL PART OF A PLANT FOR CONVERTING SILICON TETRACHLORIDE TO TRICHLOROSILANE

摘要

The invention relates to the use of a ceramic heat exchanger as an integral component of a method for the catalytic hydrodehalogenation of silicon tetrachloride to trichlorosilane in the presence of hydrogen, wherein the product gas and the reactant gases are conducted through the heat exchanger as pressurized streams and the heat exchanger comprises heat exchanger elements made of ceramic material.