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MAGNETIC SYSTEM FORMING CLOSED ISOMODULE SURFACES FROM CUSP MAGNETIC STRUCTURES, AND ECR ION SOURCES IMPLEMENTING SUCH A SYSTEM
MAGNETIC SYSTEM FORMING CLOSED ISOMODULE SURFACES FROM CUSP MAGNETIC STRUCTURES, AND ECR ION SOURCES IMPLEMENTING SUCH A SYSTEM
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机译:磁系统由尖锐的磁结构形成闭合的等模面,并且ECR离子源实现了这种系统
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摘要
The invention relates to a device for generating a magnetic field so as to be able to create closed isomodule surfaces and to do so in the context of planar symmetry and cusp magnetic structures. The invention also relates to an ECR (Electron Cyclotron Resonance) ion source implementing such a device (M1 and M2) comprising a means for injecting a microwave (B1), a means for injecting gas (B2, B3), a high-voltage-polarised plasma electrode (B6), and a mass-polarised extracting electrode (B7), so as to form an ion beam (B5) which can then be used to treat parts.
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