首页> 外国专利> MAGNETIC SYSTEM FORMING CLOSED ISOMODULE SURFACES FROM CUSP MAGNETIC STRUCTURES, AND ECR ION SOURCES IMPLEMENTING SUCH A SYSTEM

MAGNETIC SYSTEM FORMING CLOSED ISOMODULE SURFACES FROM CUSP MAGNETIC STRUCTURES, AND ECR ION SOURCES IMPLEMENTING SUCH A SYSTEM

机译:磁系统由尖锐的磁结构形成闭合的等模面,并且ECR离子源实现了这种系统

摘要

The invention relates to a device for generating a magnetic field so as to be able to create closed isomodule surfaces and to do so in the context of planar symmetry and cusp magnetic structures. The invention also relates to an ECR (Electron Cyclotron Resonance) ion source implementing such a device (M1 and M2) comprising a means for injecting a microwave (B1), a means for injecting gas (B2, B3), a high-voltage-polarised plasma electrode (B6), and a mass-polarised extracting electrode (B7), so as to form an ion beam (B5) which can then be used to treat parts.
机译:用于产生磁场的装置技术领域本发明涉及一种用于产生磁场的装置,该装置能够产生闭合的等模块表面,并且能够在平面对称和尖端磁性结构的情况下产生闭合的等模块表面。本发明还涉及实现这种装置(M1和M2)的ECR(电子回旋共振)离子源,该装置包括用于注入微波的装置(B1),用于注入气体的装置(B2,B3),高压装置。极化等离子体电极(B6)和质量极化引出电极(B7),以形成离子束(B5),然后可以使用该离子束处理零件。

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