REDUCTION OF THE DYNAMIC DEFORMATION OF TRANSLATIONAL MIRRORS USING INERTIAL MASSES

摘要

The invention relates to a micromechanical mirror arrangement, comprising a mirror plate (1), which forms a translational mirror and which is connected to a frame structure (3) by means of at least one retaining element, preferably two or more retaining elements (2) and can be moved translationally relative to said frame structure, the arrangement being characterized in that the connection area (4) of at least one, preferably of several, especially preferably of all retaining elements (2) to the mirror plate (1) is offset inward as viewed from the outer edge (5) of the mirror plate to the center (6) of the mirror plate.