A PIEZORESISTIVE SENSOR AND A METHOD OF CONTROLLING GIANT PIEZORESISTIVE COEFFICIENT OF AT LEAST ONE PIEZORESISTIVE ELEMENT

摘要

In an embodiment, a method of controlling giant piezoresistive coefficient of at least one piezoresistive element may be provided. The method may include providing an electric field to the at least one piezoresistive element to thereby create a depletion region in the at least one piezoresistive element; applying a stress onto the at least one piezoresistive element to modulate concentration and mobility of charge carriers along the at least one piezoresistive element; and varying the electric field applied onto the at least one piezoresistive element to control the giant piezoresistive coefficient of the at least one piezoresistive element. The application of stress alone may not change the giant piezoresistive coefficient, it may only change the resistance by changing the concentration and mobility of charge carriers. A piezoresistive sensor may also be provided.